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Keywords:

  • Ceramics;
  • Microfabrication;
  • Soft moulding

This paper describes a soft moulding technique for the near net-shape fabrication of three-dimensional (3D) free-standing ceramic structures with dimensions in the micrometer range for application in the micro-electromechanical systems (MEMS). Highly concentrated alumina suspensions have been patterned on thin photoresist layers coated on alumina substrates by the use of soft polymer moulds.