We thank Dr. P. Jin and Dr. K. C. Jiang at the Centre for MicroEngineering and NanoTechnology of the University of Birmingham for providing the SU-8 mould and the generous help with the photoresist coating on the alumina substrates.
Microfabrication of Three-Dimensional, Free-Standing Ceramic MEMS Components by Soft Moulding†
Version of Record online: 8 JAN 2004
Copyright © 2003 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim
Advanced Engineering Materials
Volume 5, Issue 12, pages 924–927, December, 2003
How to Cite
Zhang, D., Su, B. and Button, T.W. (2003), Microfabrication of Three-Dimensional, Free-Standing Ceramic MEMS Components by Soft Moulding. Adv. Eng. Mater., 5: 924–927. doi: 10.1002/adem.200300518
- Issue online: 8 JAN 2004
- Version of Record online: 8 JAN 2004
- Manuscript Received: 14 SEP 2003
- Soft moulding
This paper describes a soft moulding technique for the near net-shape fabrication of three-dimensional (3D) free-standing ceramic structures with dimensions in the micrometer range for application in the micro-electromechanical systems (MEMS). Highly concentrated alumina suspensions have been patterned on thin photoresist layers coated on alumina substrates by the use of soft polymer moulds.