The present paper investigates the uniaxial compression behavior of highly alloyed, focused ion beam (FIB) manufactured micropillars, ranging from 200 up to 4000 nm in diameter. The material used was the Ni-based oxide-dispersion strengthened (ODS) alloy Inconel MA6000. Stress–strain curves show a change in slip behavior comparable to those observed in pure fcc metals. Contrary to pure Ni pillar experiments, high critical resolved shear stress (CRSS) values were found independent of pillar diameter. This suggests that the deformation behavior is primarily controlled by the internal obstacle spacing, overwhelming any pillar-size-dependent mechanisms such as dislocation source action or starvation.