Fatigue Damage Behavior of Freestanding 40 µm-Thick Nickel Foils for MEMS Applications

Authors

  • Jin Xu,

    1. Shenyang National Laboratory for Materials Science, Institute of Metal Research, Chinese Academy of Sciences, 72 Wenhua Road, Shenyang 110016, P. R. China
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  • Guang-Ping Zhang

    Corresponding author
    1. Shenyang National Laboratory for Materials Science, Institute of Metal Research, Chinese Academy of Sciences, 72 Wenhua Road, Shenyang 110016, P. R. China
    • Shenyang National Laboratory for Materials Science, Institute of Metal Research, Chinese Academy of Sciences, 72 Wenhua Road, Shenyang 110016, P. R. China
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  • This work was supported by the National Natural Science Foundation of China (Grant Nos. 50971125 and 51071158) and the National Basic Research Program of China Grant No. 2010CB631003).

Abstract

Fatigue damage behavior of freestanding 40 µm-thick Ni foils was investigated. We found that there were evident differences in fatigue behaviors of the foils loaded normal to and parallel to the rolling direction. EBSD analyses revealed that fatigue cracking along grain boundaries (GBs) or slip bands in two kinds of the foils depended on the difference in Schmid factor of the grains along both sides of the GBs and the misorientation angle of the GB. Fatigue damage mechanism was discussed.

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