Light Management of Aluminum Doped Zinc Oxide Thin Films by Fabricating Periodic Surface Textures Using Direct Laser Interference Patterning


  • We acknowledge Von Ardenne Anlagentechnik GmbH for providing the AZO substrates. This work was financially supported by the Fraunhofer-Gesellschaft under Grant No. Attract 692174. The financial support of the Allianz Industrie Forschung (AIF, grant Laserstrukturierte Oberflächen für OLEDs und organische Photovoltaik) is also greatly acknowledge.

Fraunhofer-Institut für Werkstoff-und Strahltechnik, Winterberg Str. 28, 01277 Dresden, Germany



Large area micro and sub-micrometer structuring of TCO thin film layers is performed using a laser based one-step procedure. The fabricated hexagonal arranged surface patterns with 800 nm spatial period show a higher performance in both transparency and diffraction properties compared to line-like textured and non-patterned substrates. Furthermore, non-significant variations of the electrical resistance are observed after the laser treatment.