We acknowledge Von Ardenne Anlagentechnik GmbH for providing the AZO substrates. This work was financially supported by the Fraunhofer-Gesellschaft under Grant No. Attract 692174. The financial support of the Allianz Industrie Forschung (AIF, grant Laserstrukturierte Oberflächen für OLEDs und organische Photovoltaik) is also greatly acknowledge.
Light Management of Aluminum Doped Zinc Oxide Thin Films by Fabricating Periodic Surface Textures Using Direct Laser Interference Patterning†
Article first published online: 21 MAY 2013
© 2013 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim
Advanced Engineering Materials
Volume 15, Issue 10, pages 941–947, October 2013
How to Cite
Eckhardt, S., Roch, T., Sachse, C. and Lasagni, A. F. (2013), Light Management of Aluminum Doped Zinc Oxide Thin Films by Fabricating Periodic Surface Textures Using Direct Laser Interference Patterning. Adv. Eng. Mater., 15: 941–947. doi: 10.1002/adem.201300007
- Issue published online: 4 OCT 2013
- Article first published online: 21 MAY 2013
- Manuscript Revised: 26 MAR 2013
- Manuscript Received: 9 JAN 2013
- Fraunhofer-Gesellschaft. Grant Number: Attract 692174
- Allianz Industrie Forschung (AIF, grant Laserstrukturierte Oberflächen für OLEDs und organische Photovoltaik)
Large area micro and sub-micrometer structuring of TCO thin film layers is performed using a laser based one-step procedure. The fabricated hexagonal arranged surface patterns with 800 nm spatial period show a higher performance in both transparency and diffraction properties compared to line-like textured and non-patterned substrates. Furthermore, non-significant variations of the electrical resistance are observed after the laser treatment.