Nanoparticulated Dense and Stress-Free Ceramic Thick Film for Material Integration

Authors


  • This research was partially supported by New Energy and Industrial Technology Development Organization (NEDO) projects for “Innovation Promotion Program” in Japan.

Abstract

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A dense, thick, and organic-binder-free ceramic film consisting of stress-free nanoparticles could be obtained at room temperature by making use of the unstable and high-surface energy amorphous phase on the surface of particles. Photolithography and wet etching can be adapted to the thick ceramic green-state film. A multilayered structure consisting of various ceramics with different sintering temperatures and Cu wiring can form on a Cu foil below 1000 °C.

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