The authors acknowledge stimulating discussions with Profs. A. G. Evans, M. Moskovits, C. R. Safinya, and Dr. Li Youli. Dr. A. Kolmakov and Dr. J. Lofvander are acknowledged for fruitful interactions. Partial support for this work was obtained from the Microsystems Technology Office of the Defence Advanced Research Projects Agency. This work made use of MRL Central Facilities supported by MRSEC Program of the NSF under Award No. DMR-00-80034. A. S. Z acknowledges the International Fellowship (National Science Scholars Program) from the Agency for Science, Technology and Research (Singapore).
Facile Fabrication and Integration of Patterned Nanostructured TiO2 for Microsystems Applications†
Article first published online: 4 MAR 2005
Copyright © 2005 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim
Advanced Functional Materials
Volume 15, Issue 3, pages 396–402, March, 2005
How to Cite
Zuruzi, A. S. and MacDonald, N. C. (2005), Facile Fabrication and Integration of Patterned Nanostructured TiO2 for Microsystems Applications. Adv. Funct. Mater., 15: 396–402. doi: 10.1002/adfm.200400135
- Issue published online: 4 MAR 2005
- Article first published online: 4 MAR 2005
- Manuscript Accepted: 12 AUG 2004
- Manuscript Received: 30 MAR 2004
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