The project is funded by the Infotonics Center of Excellence, the Center for Future Health, and the National Science Foundation. The authors thank Dr. Lisa A. DeLouise from the University of Rochester for helpful discussions.
Macroporous Silicon Microcavities for Macromolecule Detection†
Article first published online: 22 SEP 2005
Copyright © 2005 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim
Advanced Functional Materials
Volume 15, Issue 11, pages 1851–1859, November, 2005
How to Cite
Ouyang, H., Christophersen, M., Viard, R., Miller, B. L. and Fauchet, P. M. (2005), Macroporous Silicon Microcavities for Macromolecule Detection. Adv. Funct. Mater., 15: 1851–1859. doi: 10.1002/adfm.200500218
- Issue published online: 27 OCT 2005
- Article first published online: 22 SEP 2005
- Manuscript Accepted: 3 JUN 2005
- Manuscript Received: 14 APR 2005
- Macroporous materials;
Macroporous silicon microcavities for detection of large biological molecules have been fabricated from highly doped n-type silicon. Well-defined controllable pore sizes up to 120 nm have been obtained by systematically optimizing the etching parameters. The dependence of the sensor sensitivity on pore size is discussed. Excellent infiltration inside these macroporous silicon microcavities is demonstrated using 60 nm diameter latex spheres and rabbit IgG (150 kDa; 1Da = 1 g mol–1). The sensing performance of the device is tested using a biotin/streptavidin couple, and protein concentration down to 1–2 μM (equivalent to 0.3 ng mm–2) could be detected. Simulations show that the sensitivity of the technique is currently approximately 1–2 % of a protein monolayer.