The Elastic Properties and Plastic Behavior of Two-Dimensional Polymer Structures Fabricated by Laser Interference Lithography

Authors


  • We thank S. Kooi for technical assistance and A. D. Nolte for the buckling instability test. This research was supported by the U.S. Army Research Office through the Institute for Soldier Nanotechnologies, under Contract DAAD-19-02-D-0002 and AFOSR, Grant F496200210205.

Abstract

The elastic and plastic properties within a two-dimensional polymer (SU8) structure with sixfold symmetry fabricated via interference lithography are presented. There is a nonuniform spatial distribution in the elastic modulus, with a higher elastic modulus obtained for nodes (brightest regions in the laser interference pattern) and a lower elastic modulus for beams (darkest regions in the laser interference pattern) of the photopatterned films. We suggest that such a nonuniformity and unusual plastic behavior are related to the variable material properties “imprinted” by the interference pattern.

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