Soft Lithography of Ceramic Patterns

Authors

  • O. F. Göbel,

    1. Department of Polymer Chemistry and Materials Science Center, University of Groningen Nijenborgh 4, 9747 AG Groningen (The Netherlands)
    2. Present address: Faculty of Science and Technology, University of Twente, P.O. Box 217, 7500 AE Enschede, The Netherlands
    Search for more papers by this author
  • M. Nedelcu,

    1. Department of Physics, Cavendish Laboratory, University of Cambridge, J. J. Thomson Avenue, Cambridge CB3 0HE (UK)
    2. The Nanoscience Center, Interdisciplinary Research Collaboration in Nanotechnology, University of Cambridge, 11 J. J. Thomson Avenue, Cambridge CB3 0FF (UK)
    Search for more papers by this author
  • U. Steiner

    1. Department of Physics, Cavendish Laboratory, University of Cambridge, J. J. Thomson Avenue, Cambridge CB3 0HE (UK)
    2. The Nanoscience Center, Interdisciplinary Research Collaboration in Nanotechnology, University of Cambridge, 11 J. J. Thomson Avenue, Cambridge CB3 0FF (UK)
    Search for more papers by this author

  • We acknowledge the help of B. J. Kooi (TEM imaging), H. Nijland and M. Smithers (SEM imaging), and T. Hibma (use of X-ray diffractometer).

Abstract

Polymer-based precursor solutions are patterned using a soft-lithographic patterning technique to yield sub-micrometer-sized ceramic patterns. By using a polymer–metal-nitrate solution as a lithographic resist, we demonstrate a micromolding procedure using a simple rubber stamp that yields a patterned precursor layer. A subsequent high-temperature annealing step degrades the polymer giving rise to a patterned metal oxide film. This procedure is demonstrated for three different ceramic materials: Al2O3, ZnO, and PbTiO3. Al2O3 initially forms an amorphous phase that is subsequently converted into a polycrystalline material upon electron irradiation. The formed ZnO and PbTiO3 are polycrystalline. PbTiO3 exhibits epitaxial alignment when cast onto a SrTiO3(001) surface that matches its lattice periodicity. This epitaxial alignment is maintained when the PbTiO3 phase is patterned by micromolding, giving rise to epitaxially grown PbTiO3 patterns with feature sizes down to 300 nm.

Ancillary