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Keywords:

  • Chemical vapor deposition;
  • Photonic crystals;
  • Polymers;
  • Silicon;
  • Templates

Abstract

Silicon inverse woodpile photonic crystals are fabricated for the first time. Our approach, which is based on direct laser writing of polymeric templates and a novel silicon single-inversion procedure, leads to high-quality structures with gap/midgap ratios of 14.2 %, centered at a wavelength of 2.5 μm. It is shown that gap/midgap ratios as large as 20.5 %, centered at 1.55 μm, may become possible in the future.