Full Paper

High Energy Density All-Solid-State Batteries: A Challenging Concept Towards 3D Integration†

  1. Loıc Baggetto1,
  2. Rogier A. H. Niessen2,
  3. Fred Roozeboom3,4,
  4. Peter H. L. Notten1,2,*

Article first published online: 31 MAR 2008

DOI: 10.1002/adfm.200701245

Issue

Advanced Functional Materials

Advanced Functional Materials

Volume 18, Issue 7, pages 1057–1066, April 11, 2008

Additional Information

How to Cite

Baggetto, L., Niessen, R. A. H., Roozeboom, F. and Notten, P. H. L. (2008), High Energy Density All-Solid-State Batteries: A Challenging Concept Towards 3D Integration. Advanced Functional Materials, 18: 1057–1066. doi: 10.1002/adfm.200701245

Author Information

  1. 1

    Department of Chemical Engineering and Chemistry, Eindhoven University of Technology Den Dolech 2, 5600 MB Eindhoven (The Netherlands)

  2. 2

    Philips Research Laboratories, High Tech Campus 4 5656 AE Eindhoven (The Netherlands)

  3. 3

    NXP Semiconductors Research, High Tech Campus 4 5656 AE Eindhoven (The Netherlands)

  4. 4

    Department of Applied Physics, Eindhoven University of Technology Den Dolech 2, 5600 MB Eindhoven (The Netherlands)

*Department of Chemical Engineering and Chemistry, Eindhoven University of Technology Den Dolech 2, 5600 MB Eindhoven (The Netherlands).

  1. †

    We gratefully thank Jeroen van Zijl, Jan Verhoeven, Harold Roosen, Tiny den Dekker, Monique Vervest, Hetty de Barse, Monja Kaiser, Thuy Dao, Peer Zalm and Frans Schraven for their technical and analytical support. This work has been financially supported by the Dutch Science Foundation SenterNovem.

Publication History

  1. Issue published online: 18 APR 2008
  2. Article first published online: 31 MAR 2008
  3. Manuscript Revised: 18 JAN 2008
  4. Manuscript Received: 29 OCT 2007

Funded by

  • Dutch Science Foundation SenterNovem

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Keywords:

  • solid-state batteries;
  • lithium-ion batteries;
  • integration

Graphical Abstract

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Based on the excellent intercalation chemistry of Si thin films, a new 3D-.integrated all-.solid-.state battery concept is proposed. Poly-.Si thin film anodes are characterized with respect to their thermodynamic and kinetic properties and cycle-.life. Sputtered Ta, TaN and TiN films have been investigated as potential Li-diffusion barrier layers.

Abstract

Rechargeable all-solid-state batteries will play a key role in many autonomous devices. Planar solid-state thin film batteries are rapidly emerging but reveal several drawbacks, such as a relatively low energy density and the use of highly reactive metallic lithium. In order to overcome these limitations a new 3D-integrated all-solid-state battery concept with significantly increased surface area is presented. By depositing the active battery materials into high-aspect ratio structures etched in, for example silicon, 3D-integrated all-solid-state batteries are calculated to reach a much higher energy density. Additionally, by adopting novel high-energy dense Li-intercalation materials the use of metallic Lithium can be avoided. Sputtered Ta, TaN and TiN films have been investigated as potential Li-diffusion barrier materials. TiN combines a very low response towards ionic Lithium and a high electronic conductivity. Additionally, thin film poly-Si anodes have been electrochemically characterized with respect to their thermodynamic and kinetic Li-intercalation properties and cycle life. The Butler-Vollmer relationship was successfully applied, indicating favorable electrochemical charge transfer kinetics and solid-state diffusion. Advantageously, these new Li-intercalation anode materials were found to combine an extremely high energy density with fast rate capability, enabling future 3D-integrated all-solid-state batteries.

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