Pure-Silica-Zeolite MFI and MEL Low-Dielectric-Constant Films with Fluoro-Organic Functionalization


  • The authors thank AMD, Engelhard, UC Discovery grant, and the National Science Foundation (grant CTS-0404376) for their financial support, Stephen McDaniel from the Central Facility for Advanced Microscopy and Microanalysis of UCR for help with TEM, and Jacqueline Wong for her help with the capacitance measurement system. Supporting Information is available online from Wiley InterScience or from the author.


The synthesis of organic-functionalized pure-silica-zeolites (PSZs) with MFI- and MEL-type structures for low-k applications prepared through a direct-synthesis method by adding a fluorinated silane to the synthesis solution is reported. The added fluorine functionality increases the hydrophobicity of the zeolites, which are characterized by scanning electron microscopy, X-ray diffraction, 29Si and 19F solid-state NMR spectroscopy, nitrogen adsorption, and thermogravimetric analysis. The functionalized zeolite powders have low water content and calcined spin-on films prepared from the functionalized nanoparticle suspensions exhibit higher water contact angles and lower k values (2.1 and 1.8 for the functionalized MFI- and MEL-type zeolites, respectively) than PSZ films. The use of a direct-synthesis method to decrease the moisture adsorption in the films eliminates the extra post-spin-on silylation steps that are traditionally used to render the zeolite films hydrophobic.