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Keywords:

  • crossbar networks;
  • scanning tunneling microscopy;
  • self-organization;
  • silicon nanowires

Abstract

Here, bottom-up nanofabrication for the two-dimensional self-organization of a highly integrated, well-defined silicon nanowire (SiNW) mesh on a naturally-patterned Si(110)–16 × 2 surface by controlling the lateral growths of two non-orthogonal 16 × 2 domains is reported. This self-ordered nanomesh consists of two crossed arrays of parallel-aligned SiNWs with nearly identical widths of 1.8–2.5 nm and pitches of 5.0–5.9 nm, and is formed over a mesoscopic area of 300 × 270 nm2 so as to show a high integration density in excess of 104 µm−2. These crossed SiNWs exhibit semiconducting character with an equal band gap of ∼0.95 eV as well as unique quantum confinement effect. Such an ultrahigh-density SiNW network can serve as a versatile nanotemplate for nanofabrication and nanointegration of the highly-integrated metal-silicide or molecular crossbar nanomesh on Si(110) surface for a broad range of device applications. Also, the multi-layer, vertically-stacked SiNW networks can be self-assembled through hierarchical growth, which opens the possibility for creating three-dimensionally interconnected crossbar circuits. The ability to self-organize an ultrahigh-density, functional SiNW network on a Si(110) surface represents a simple step toward the fabrication of highly-integrated crossbar nanocircuits in a very straightforward, fast, cost-effective, and high throughput process.