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Full Paper
Integration of Density Multiplication in the Formation of Device-Oriented Structures by Directed Assembly of Block Copolymer–Homopolymer Blends
Article first published online: 25 MAR 2010
DOI: 10.1002/adfm.200902229
Copyright © 2010 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim
Additional Information
How to Cite
Liu, G., Thomas, C. S., Craig, G. S. W. and Nealey, P. F. (2010), Integration of Density Multiplication in the Formation of Device-Oriented Structures by Directed Assembly of Block Copolymer–Homopolymer Blends. Adv. Funct. Mater., 20: 1251–1257. doi: 10.1002/adfm.200902229
Publication History
- Issue published online: 14 APR 2010
- Article first published online: 25 MAR 2010
- Manuscript Received: 25 NOV 2009
Funded by
- Semiconductor Research Corporation (SRC)
- NSF through the UW-Nanoscale Science and Engineering Center (NSEC). Grant Number: DMR0425880
- Abstract
- Article
- References
- Cited By
Keywords:
- block copolymers;
- directed assembly;
- density multiplication;
- device-oriented structures
Abstract
Non-regular, device-oriented structures can be directed to assemble on chemically nanopatterned surfaces such that the density of features in the assembled pattern is multiplied by a factor of two or more compared to the chemical pattern. By blending the block copolymers with homopolymers and designing the chemical pattern rationally, complicated structures such as bends, jogs, junctions, terminations, and combined structures are fabricated. Previously, directed assembly of block copolymers has been shown to enhance the resolution of lithographic processes for hexagonal arrays of spots and parallel lines, corresponding to the bulk morphologies of block copolymer systems, but this is the first demonstration of enhanced resolution for more complicated, device-oriented features. This fundamental knowledge broadens the range of technologies that can be served by the directed assembly of block copolymers.