Large-Area Nanoscale Patterning of Functional Materials by Nanomolding in Capillaries

Authors

  • Xuexin Duan,

    1. Molecular Nanofabrication group MESA+ Institute for Nanotechnology, University of Twente P. O. Box 217, 7500 AE Enschede (The Netherlands)
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  • Yiping Zhao,

    1. Molecular Nanofabrication group MESA+ Institute for Nanotechnology, University of Twente P. O. Box 217, 7500 AE Enschede (The Netherlands)
    2. Transducers Science and Technology Group MESA+ Institute for Nanotechnology, University of Twente P. O. Box 217, 7500 AE Enschede (The Netherlands)
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  • Erwin Berenschot,

    1. Transducers Science and Technology Group MESA+ Institute for Nanotechnology, University of Twente P. O. Box 217, 7500 AE Enschede (The Netherlands)
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  • Niels R. Tas,

    1. Transducers Science and Technology Group MESA+ Institute for Nanotechnology, University of Twente P. O. Box 217, 7500 AE Enschede (The Netherlands)
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  • David N. Reinhoudt,

    1. Molecular Nanofabrication group MESA+ Institute for Nanotechnology, University of Twente P. O. Box 217, 7500 AE Enschede (The Netherlands)
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  • Jurriaan Huskens

    Corresponding author
    1. Molecular Nanofabrication group MESA+ Institute for Nanotechnology, University of Twente P. O. Box 217, 7500 AE Enschede (The Netherlands)
    • Molecular Nanofabrication group MESA+ Institute for Nanotechnology, University of Twente P. O. Box 217, 7500 AE Enschede (The Netherlands).
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Abstract

Within the past years there has been much effort in developing and improving new techniques for the nanoscale patterning of functional materials used in promising applications like nano(opto)electronics. Here a high-resolution soft lithography technique—nanomolding in capillaries (NAMIC)—is demonstrated. Composite PDMS stamps with sub-100 nm features are fabricated by nanoimprint lithography to yield nanomolds for NAMIC. NAMIC is used to pattern different functional materials such as fluorescent dyes, proteins, nanoparticles, thermoplastic polymers, and conductive polymers at the nanometer scale over large areas. These results show that NAMIC is a simple, versatile, low-cost, and high-throughput nanopatterning tool.

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