Wafer-Level Self-Organized Copolymer Templates for Nanolithography with Sub-50 nm Feature and Spatial Resolutions
Article first published online: 25 FEB 2011
Copyright © 2011 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim
Advanced Functional Materials
Volume 21, Issue 6, pages 1102–1112, March 22, 2011
How to Cite
Krishnamoorthy, S., Manipaddy, K. K. and Yap, F. L. (2011), Wafer-Level Self-Organized Copolymer Templates for Nanolithography with Sub-50 nm Feature and Spatial Resolutions. Adv. Funct. Mater., 21: 1102–1112. doi: 10.1002/adfm.201002380
- Issue published online: 18 MAR 2011
- Article first published online: 25 FEB 2011
- Manuscript Revised: 1 DEC 2011
- Manuscript Received: 11 NOV 2010
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