The Control of Shrinkage and Thermal Instability in SU-8 Photoresists for Holographic Lithography
Article first published online: 7 MAR 2011
Copyright © 2011 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim
Advanced Functional Materials
Volume 21, Issue 9, pages 1593–1601, May 10, 2011
How to Cite
Denning, R. G., Blanford, C. F., Urban, H., Bharaj, H., Sharp, D. N. and Turberfield, A. J. (2011), The Control of Shrinkage and Thermal Instability in SU-8 Photoresists for Holographic Lithography. Adv. Funct. Mater., 21: 1593–1601. doi: 10.1002/adfm.201002653
- Issue published online: 28 APR 2011
- Article first published online: 7 MAR 2011
- Manuscript Received: 17 DEC 2010
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