3D Out-of-Plane Rotational Etching with Pinned Catalysts in Metal-Assisted Chemical Etching of Silicon
Version of Record online: 3 JUN 2011
Copyright © 2011 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim
Advanced Functional Materials
Volume 21, Issue 16, pages 3119–3128, August 23, 2011
How to Cite
Hildreth, O. J., Brown, D. and Wong, C. P. (2011), 3D Out-of-Plane Rotational Etching with Pinned Catalysts in Metal-Assisted Chemical Etching of Silicon. Adv. Funct. Mater., 21: 3119–3128. doi: 10.1002/adfm.201100279
- Issue online: 11 AUG 2011
- Version of Record online: 3 JUN 2011
- Manuscript Received: 3 FEB 2011
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