3D Free-Form Patterning of Silicon by Ion Implantation, Silicon Deposition, and Selective Silicon Etching
Article first published online: 8 JUN 2012
Copyright © 2012 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim
Advanced Functional Materials
Volume 22, Issue 19, pages 4004–4008, October 10, 2012
How to Cite
Fischer, A. C., Belova, L. M., Rikers, Y. G. M., Malm, B. G., Radamson, H. H., Kolahdouz, M., Gylfason, K. B., Stemme, G. and Niklaus, F. (2012), 3D Free-Form Patterning of Silicon by Ion Implantation, Silicon Deposition, and Selective Silicon Etching. Adv. Funct. Mater., 22: 4004–4008. doi: 10.1002/adfm.201200845
- Issue published online: 2 OCT 2012
- Article first published online: 8 JUN 2012
- Manuscript Received: 26 MAR 2012
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