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Large-Scale Nano Piezo Force Position Arrays as Ultrahigh-Resolution Micro- and Nanoparticle Tracker

Authors

  • Kittitat Subannajui,

    Corresponding author
    1. Laboratory for Nanotechnology, Department of Microsystems Engineering (IMTEK), University of Freiburg, Freiburg 79110, Germany
    2. Faculty of Science, Mahidol University, 272 Rama VI Road, Ratchathewi District, Bangkok 10400, Thailand
    • Laboratory for Nanotechnology, Department of Microsystems Engineering (IMTEK), University of Freiburg, Freiburg 79110, Germany.
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  • Andreas Menzel,

    Corresponding author
    1. Laboratory for Nanotechnology, Department of Microsystems Engineering (IMTEK), University of Freiburg, Freiburg 79110, Germany
    • Laboratory for Nanotechnology, Department of Microsystems Engineering (IMTEK), University of Freiburg, Freiburg 79110, Germany.
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  • Firat Güder,

    1. Laboratory for Nanotechnology, Department of Microsystems Engineering (IMTEK), University of Freiburg, Freiburg 79110, Germany
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  • Yang Yang,

    1. Laboratory for Nanotechnology, Department of Microsystems Engineering (IMTEK), University of Freiburg, Freiburg 79110, Germany
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  • Katrin Schumann,

    1. Institute for Applied Materials, Karlsruhe Insitute of Technology (KIT), D-76344 Eggenstein-Leopoldshafen, Germany
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  • Xiaoli Lu,

    1. State Key Discipline Laboratory of Wide Band Gap Semiconductor Technology, School of Microelectronics, Xidian University, Xi'an 710071, China
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  • Margit Zacharias

    Corresponding author
    1. Laboratory for Nanotechnology, Department of Microsystems Engineering (IMTEK), University of Freiburg, Freiburg 79110, Germany
    2. FRIAS, School of Soft Matter Research, University of Freiburg, Albertstraße 19, 79104 Freiburg, Germany
    • Laboratory for Nanotechnology, Department of Microsystems Engineering (IMTEK), University of Freiburg, Freiburg 79110, Germany.
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Abstract

Defining the position of an object on a planar substrate by force sensors is a common technology nowadays. Many products are commercialized worldwide, which make use of force sensors, especially, for instance, touchpads. Here advanced lithography processes together with piezoelectric materials are demonstrated to fabricate an extremely high resolution force sensor. The approach combines a large array of nanoscale piezoelectric lines fabricated on Si wafer by phase-shift lithography and atomic-layer-deposition-based spacer lithography techniques. These key lithography methods are utilized to fabricate ultralong (cm range) nanolines on the wafer scale. ZnO and P(VDF-TrFE) are selected here as materials for piezoelectric signal generators. The detection mechanisms are explained and simulations combined with experimental data are demonstrated to prove the concept. The signal generated when an object approaches one single line is in the nanoampere range. The result enables a new and simple path for a device fabrication, which defines the position with micro- and nanometer resolution and can be used, for example, as micro- and nanoparticle trackers.

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