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Keywords:

  • InGaZnO;
  • thin film transistor;
  • roll transfer printing;
  • load-controlled roll transfer mechanics;
  • stretchable electronics

Abstract

A stretchable and transparent In-Ga-Zn-O (IGZO) thin film transistors with high electrical performance and scalability is demonstrated. A load-controlled roll transfer method is realized for fully automated and scalable transfer of the IGZO TFTs from a rigid substrate to a nonconventional elastomeric substrate. The IGZO TFTs exhibit high electrical performance under stretching and cyclic tests, demonstrating the potentiality of the load-controlled roll transfer in stretchable electronics. The mechanics of the load-controlled roll transfer is investigated and simulated, and it is shown that the strain level experienced by the active layers of the device can be controlled to well below their maximum fracture level during transfer.