Lithography: Large-Scale Nano Piezo Force Position Arrays as Ultrahigh-Resolution Micro- and Nanoparticle Tracker (Adv. Funct. Mater. 2/2013)

Authors

  • Kittitat Subannajui,

    Corresponding author
    1. Laboratory for Nanotechnology, Department of Microsystems Engineering (IMTEK), University of Freiburg, Freiburg 79110, Germany
    2. Faculty of Science, Mahidol University, 272 Rama VI Road, Ratchathewi District, Bangkok 10400, Thailand
    • Laboratory for Nanotechnology, Department of Microsystems Engineering (IMTEK), University of Freiburg, Freiburg 79110, Germany.
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  • Andreas Menzel,

    Corresponding author
    1. Laboratory for Nanotechnology, Department of Microsystems Engineering (IMTEK), University of Freiburg, Freiburg 79110, Germany
    • Laboratory for Nanotechnology, Department of Microsystems Engineering (IMTEK), University of Freiburg, Freiburg 79110, Germany.
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  • Firat Güder,

    1. Laboratory for Nanotechnology, Department of Microsystems Engineering (IMTEK), University of Freiburg, Freiburg 79110, Germany
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  • Yang Yang,

    1. Laboratory for Nanotechnology, Department of Microsystems Engineering (IMTEK), University of Freiburg, Freiburg 79110, Germany
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  • Katrin Schumann,

    1. Institute for Applied Materials, Karlsruhe Insitute of Technology (KIT), D-76344 Eggenstein-Leopoldshafen, Germany
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  • Xiaoli Lu,

    1. State Key Discipline Laboratory of Wide Band Gap Semiconductor Technology, School of Microelectronics, Xidian University, Xi'an 710071, China
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  • Margit Zacharias

    Corresponding author
    1. Laboratory for Nanotechnology, Department of Microsystems Engineering (IMTEK), University of Freiburg, Freiburg 79110, Germany
    2. FRIAS, School of Soft Matter Research, University of Freiburg, Albertstraße 19, 79104 Freiburg, Germany
    • Laboratory for Nanotechnology, Department of Microsystems Engineering (IMTEK), University of Freiburg, Freiburg 79110, Germany.
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Abstract

original image

Force position arrays which are able to track the position of micro- or nanometer-sized objects require an extremely high spatial resolution down to the nanometer range. On page 191, Kittitat Subannajui, Andreas Menzel, Margit Zacharias, and co-workers report methods which combine advanced lithographic processes and piezoelectric materials on a large scale. The structures are achieved by phaseshift lithography and atomic-layer-deposition-based spacer lithography.

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