Self-Assembled Monolayer Coatings on Nanostencils for the Reduction of Materials Adhesion (pages 219–224)
M. Kölbel, R.W. Tjerkstra, G. Kim, J. Brugger, C.J.M. van Rijn, W. Nijdam, J. Huskens and D.N. Reinhoudt
Version of Record online: 7 MAR 2003 | DOI: 10.1002/adfm.200390033
Nanostencils (shadow masks with submicrometer apertures in a thin silicon nitride membrane) may suffer from clogging of the apertures due to adhesion of evaporated material. Here it is shown that nanostencils coated with self-assembled monolayers show considerably less adhesion of gold compared to bare stencils, in turn producing better defined features (see Figure, gold features defined by uncoated (left) or coated (right) masks with 350 nm pores).