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Silicon micro-velcro

Authors

  • Prof. Michael L. Reed,

    Corresponding author
    1. Department of Electrical and Computer Engineering, Carnegie Mellon University, Pittsburgh, PA 15213–3890 (USA)
    • Department of Electrical and Computer Engineering Carnegie Mellon University Pittsburgh, PA 15213–3890 (USA)
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  • Hongtao Han,

    1. Department of Electrical and Computer Engineering, Carnegie Mellon University, Pittsburgh, PA 15213–3890 (USA)
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  • Dr. Lee E. Weiss

    1. Robotics Institute, Carnegie Mellon University Pittsburgh, PA 15213–3890 (USA)
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  • The authors wish to thank M. Wholey, J. Suhan, C. Bowman, L. Rathbun, T. Schlesinger, W. Maly, and P. Steif for their assistance. Mask fabrication was performed at the National Nanofabrication Facility at Cornell University. This research was supported by the National Science Foundation.

Abstract

Silicon micromachining technology has been employed to fabricate dense, regular arrays of microstructures which act as mechanical adhesives. Structures such as that shown in the figure have potential applications in the biocompatible bonding of human tissue during surgery, their barb-like nature preventing retraction. A second approach, using mating structures, provides precision self-alligning, room-temperature bonding with potential in the mounting of integrated circuit chips.

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