Reaction pathways in organometallic chemical vapor deposition(OMCVD)

Authors

  • Dr. Alfred Zinn,

    1. Department of Chemistry and Biochemistry, University of California Los Angeles. CA 90024-1569 (USA)
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  • Dr. Burkhard Niemer,

    1. Department of Chemistry and Biochemistry, University of California Los Angeles. CA 90024-1569 (USA)
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  • Prof. Herbert D. Kaesz

    Corresponding author
    1. Department of Chemistry and Biochemistry, University of California Los Angeles. CA 90024-1569 (USA)
    • Department of Chemistry and Biochemistry, University of California Los Angeles. CA 90024-1569 (USA)
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  • Dedicated to Prof. Wolfgang Beck on the occassion of his 60th birthday

Abstract

The incorporation of heteroatom impurities derived from the ligands in organometallic chemical vapor deposition can now be avoided due to an understanding of the raection pathways involved. The development of the technique is traced, the various mechanisms discussed, and the important questions which still have to be answered presented.

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