Allyl(β-diketonato)palladium(II) complexes as precursors for palladium films

Authors

  • Dr. Zheng Yuan,

    1. Department of Chemistry, University of Western Ontario London, Ontario N6A 5B7 (Canada)
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  • Prof. Richard J. Puddephatt

    Corresponding author
    1. Department of Chemistry, University of Western Ontario London, Ontario N6A 5B7 (Canada)
    • Department of Chemistry, University of Western Ontario London, Ontario N6A 5B7 (Canada)
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  • We thank the N. S. E. R. C (Canada) and the O. C. M. R. for financial support

Abstract

Chemical vapor deposition (CVD) of palladium is at present not used commercially, despite the widespread use of palladium films in electronics and data storage, because suitable precursors are not available. New palladium precursors, ally (β-diketonato)palladium(II) complexes (see Figure) are reported, along with the conditions required for the formation of pure palladium films by CVD.

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