Microfabrication by microcontact printing of self-assembled monolayers


  • This research was supported in part by the Advanced Research Projects Agency. JLW gratefully acknowledges a postdoctoral fellowship from the National Institutes of Health (Grant Number 1-F32 GM 16511-01). We thank AT & T for donating the master used in fabricating the PDMS stamp used to generate the patterns shown in Figure 2. We also thank Hans Biebuyck for helpful discussions and suggestions.


Microcontact printing, is described. It offers extreme experimental simplicity and flexibility, relying on the ability of self-assembled monolayers (SAMs) of longchain alkanethiolates on gold and other metals to act as nanometer resists. The Figure is an electron micrograph of a silicon microstructure resulting from chemical etching of a patterned SAM.

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