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Advanced Materials

MOCVD Routes to Thin Metal Oxide Films for superconducting electronics

Authors

  • Dr. Douglas L. Schulz,

    Corresponding author
    1. National Renewable Energy Laboratory 1617 Cole Boulevard, Golden, CO 80401-3393 (USA)
    • National Renewable Energy Laboratory 1617 Cole Boulevard, Golden, CO 80401-3393 (USA)
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    • was born in Fargo, ND, in 1966. He received a B.S. degree in chemistry from North Dakota State University in 1988, where he studied materials chemistry with G. J: McCarthy. He obtained a Ph.D. degree in chemistry from Northwestern University in 1993 for research with 7: J. Marks focusing on the development of MOCVD routes to TI-Ba-Ca-Cu-0 films and the advancement of metal-organic barium precursor chemistry. He is currently a postdoctoral research associate at the National Renewable Energy Laboratory, working with D. S. Ginley. His present interests are the development of TI-Ba-Ca-Cu-0 tapes for energy storage applications and laser ablation routes to photovoltaic devices.

  • Prof. Tobin J. Marks

    Corresponding author
    1. Department of Chemistry and the Science and Technology Center for Superconductivity Northwestern University 2145 N. Sheridan Road, Evanston, IL 60208-3113 (USA)
    • Department of Chemistry and the Science and Technology Center for Superconductivity Northwestern University 2145 N. Sheridan Road, Evanston, IL 60208-3113 (USA)
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    • was born in Washington, DC, in 1944. He received a B.S. degree in chemistry from the University of Maryland in 1966 and a Ph.D. in inorganic chemistryfrom Massachusetts Institute of Technology in 1970, working with R A. Cotton. He moved to Northwestern University as an assistant professor in 1970. He is currently Charles E. and Emma H. Morrison Professor of Chemistry and Professor of Materials Science and Engineering at Northwestern University. His research interests include the synthesis and properties of unusual molecules and moleculederived materials.


  • The research at Northwestern University was supported by the National Science Foundation through the Science and Technology Center for Superconductivity (Grant DMR 91 20000) and the Northwestern Materials Research Center (Grant DMR 91 20521), and by ARPA through contract 91-C-0112. We acknowledge the invaluable contributions of many colleagues whose names can be found in the references.

Abstract

Superconducting, semiconducting and insulating oxide thin films are of interest for applications as active and passive components in microelectronic device technologies. Metal organic chemical vapor deposition (MOCVD) is an important method of thin film production and its use in developing device structures such as that in the figure is discussed.

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