We gratefully acknowledge assistance from D. Palmeri and the Center of Electron Microscopy of the University of Ferrara. The work was partially supported by the European Union under the Brite-Euram project “Functional nano-scaled materials for long term stable gas sensors (Nanogas)” No. BE-7303 (Contract No. BRE2-CT94–0940).
A novel method for the preparation of nanosized tio2 thin films†
Article first published online: 29 OCT 2004
Copyright © 1996 Verlag GmbH & Co. KGaA, Weinheim
Volume 8, Issue 4, pages 334–337, April 1996
How to Cite
Sberveglieri, G., Depero, L. E., Nelli, P., Perego, C., Sangaletti, L., Ferroni, M., Guidi, V. and Martinelli, G. (1996), A novel method for the preparation of nanosized tio2 thin films. Adv. Mater., 8: 334–337. doi: 10.1002/adma.19960080410
- Issue published online: 29 OCT 2004
- Article first published online: 29 OCT 2004
- Manuscript Revised: 29 JAN 1996
- Manuscript Received: 20 DEC 1995
Nanostructured titanium dioxide has many important applications, including several in chemical sensors, for example in “electronic noses”. A new method of preparing nanosized TiO2 thin films based on rf magnetron sputtering is reported and the characterization of the resulting films described. Results are presented for the temperature variation of the electrical response of the films to NO2, in particular the response and recovery times of the resistance of the layer.