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AFM studies of the initial stages of spin-coated prepolymer film growth on silicon wafers

Authors

  • Thomas Gesang,

    Corresponding author
    1. Fraunhofer Institut für Angewandte Materialforschung Neuer Steindamm 2, D-28719 Bremen (Germany)
    • Fraunhofer Institut für Angewandte Materialforschung Neuer Steindamm 2, D-28719 Bremen (Germany)
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  • Dr. Ralf Höper,

    1. Fraunhofer Institut für Angewandte Materialforschung Neuer Steindamm 2, D-28719 Bremen (Germany)
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  • Prof. Wulf Possart,

    1. Fraunhofer Institut für Angewandte Materialforschung Neuer Steindamm 2, D-28719 Bremen (Germany)
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  • Prof. Jürgen Petermann,

    1. Fraunhofer Institut für Angewandte Materialforschung Neuer Steindamm 2, D-28719 Bremen (Germany)
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  • Prof. Otto-Diedrich Hennemann

    Corresponding author
    1. Fraunhofer Institut für Angewandte Materialforschung Neuer Steindamm 2, D-28719 Bremen (Germany)
    • Fraunhofer Institut für Angewandte Materialforschung Neuer Steindamm 2, D-28719 Bremen (Germany)
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  • It is a pleasure to acknowledge polymer synthesis by S. Jährig and the preparation of the spin-coating films by D. Fanter. Moreover, we acknowledge the XPS and AES investigations of S. Dieckhoff and V. Schlett, the ellipsometry measurements by D. Fanter, HPLC measurements performed by S. Jährig, and the preparation of the trimer film by S. Dieckhoff. We are grateful for part-funding of the programme by the Volkswagen-Stiftung.

Abstract

Polymeric film growth on inorganic substrates plays an important role in the technology of sensors and microelectronics. A study of the film growth of a prepolymer of the dicyanate of bisphenol A (DCBA) spin-coated onto silicon substrates is presented in which layer-by-layer growth is demonstrated. This mode of growth is thought to be related to an enrichment of the trimer (see Figure) including a triazine ring.

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