Communication

Replica molding using polymeric materials: A practical step toward nanomanufacturing†

  1. Dr. Younan Xia1,
  2. Dr. Jabez J. McClelland2,
  3. Dr. Rajeev Gupta2,
  4. Dr. Dong Qin1,
  5. Dr. Xiao-Mei Zhao1,
  6. Prof. Lydia L. Sohn3,
  7. Dr. Robert J. Celotta2,
  8. Prof. George M. Whitesides1

Article first published online: 29 OCT 2004

DOI: 10.1002/adma.19970090211

Issue

Advanced Materials

Advanced Materials

Volume 9, Issue 2, pages 147–149, February 1997

Additional Information

How to Cite

Xia, Y., McClelland, J. J., Gupta, R., Qin, D., Zhao, X.-M., Sohn, L. L., Celotta, R. J. and Whitesides, G. M. (1997), Replica molding using polymeric materials: A practical step toward nanomanufacturing. Advanced Materials, 9: 147–149. doi: 10.1002/adma.19970090211

Author Information

  1. 1

    Department of Chemistry and Chemical Biology Harvard University 12 Oxford Street, Cambridge, MA 02138 (USA)

  2. 2

    Electron Physics Group National Institute of Standards and Technology Gaithersburg, MD 20899 (USA)

  3. 3

    Dept. of Physics, Princeton University Princeton, NJ 08544 (USA)

  1. †

    This work was supported in part by ONR and ARPA. This work made use of MRSEC Shared Facilities supported by the National Science Foundation under Award Number DMR-9400396.

Publication History

  1. Issue published online: 29 OCT 2004
  2. Article first published online: 29 OCT 2004
  3. Manuscript Received: 14 AUG 1996

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The reliable fabrication of nanostructures is polymer materials, i.e. structures with feature sizes below 100 nm, is an important goal if progress in the application of such materials in electronic, magnetic, and optical devices is to be maintained. Replica molding has been used extensively to produce micrometer sized features. Here, the technique is extended to the nanometer regime such as that shown in the figure. fig.

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