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Replica molding using polymeric materials: A practical step toward nanomanufacturing

Authors


  • This work was supported in part by ONR and ARPA. This work made use of MRSEC Shared Facilities supported by the National Science Foundation under Award Number DMR-9400396.

Abstract

The reliable fabrication of nanostructures is polymer materials, i.e. structures with feature sizes below 100 nm, is an important goal if progress in the application of such materials in electronic, magnetic, and optical devices is to be maintained. Replica molding has been used extensively to produce micrometer sized features. Here, the technique is extended to the nanometer regime such as that shown in the figure. fig.

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