Fabrication of glassy carbon microstructures by pyrolysis of microfabricated polymeric precursors


  • This work has been supported in part by the Office of Naval Research and the Defense Advanced Research Projects Agency. It used MRSEC Shared Facilities supported by the National Science Foundation (DMR-9400396). The authors thank Xiao-Mei Zhao for demonstrating microtransfer molding.


High-carbin mcirostructures as components in microelectromechanical structures and microreactors are of particular interest because their mechanical, electrical, and chemical properties can be controlled by the temperature of preparation. The range of electrical properties is especially impressive. A method of fabricating microstructures of glassy carbon and other high-carbon solids is presented, based on micromolding of polymers to form precursors to these structures and pyrolysis to yield the carbon solids. The advantages of the technique are discussed.