This work has been partially supported by MIUR (Ministero dell'Istruzione, dell'Università e della Ricerca). The authors wish to thank Mr. Corrado Bongiorno of the IMM CNR of Catania for assisting in TEM observation. The work reported herein was communicated in part at the EURO CVD-14 conference, Paris, France, 27 April – 2 May 2003.
A Simple Route to the Synthesis of Pr2O3 High-k Thin Films†
Article first published online: 30 JUN 2003
Copyright © 2003 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim
Volume 15, Issue 13, pages 1071–1075, July, 2003
How to Cite
Lo Nigro, R., Toro, R.G., Malandrino, G., Raineri, V. and Fragalà, I.L. (2003), A Simple Route to the Synthesis of Pr2O3 High-k Thin Films. Adv. Mater., 15: 1071–1075. doi: 10.1002/adma.200304806
- Issue published online: 30 JUN 2003
- Article first published online: 30 JUN 2003
- Manuscript Accepted: 24 MAR 2003
- Manuscript Received: 23 DEC 2002
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