Fabrication of Highly Conductive 12CaO·7Al2O3 Thin Films Encaging Hydride Ions by Proton Implantation

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Abstract

Thin films of a new transparent oxide semiconductor 12CaO·7Al2O3 consisting of subnanometer-sized cages (see Figure inset) have been fabricated, and their light-induced insulator–conductor conversion is described. Proton implantation at a fluence of 1 × 1018 cm–2 followed by UV-light irradiation increases the electrical conductivity by more than eleven orders of magnitude to the largest value ∼ 10 S cm–1 (see Figure). The conducting state is erasable by heating.

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