Phase Separation Micromolding—PSμM

Authors


  • The authors gratefully acknowledge Albert van den Berg, Miko Elwenspoek and Kobus Kuipers for helpful comments on the manuscript.

Abstract

Microstructures from a broad spectrum of materials, ranging from polymers to ceramics and metals, can be fabricated by phase separation micromolding (PSμM), a generic microfabrication technique. PSμM offers the possibility to introduce porosity; the process benefits from intrinsic shrinkage, which facilitates the fabrication of completely open microstructures (see Figure), and also promotes defect-free release of the microstructure.

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