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Nanoporous Ultra-Low-κ Films Prepared from Fluorinated Polyimide with Grafted Poly(acrylic acid) Side Chains

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Abstract

Thermal decomposition of labile poly(acrylic acid) (PAAc) side chains grafted onto fluorinated polyimide backbones (see Figure) is used to prepare nanoporous ultra-low-κ fluorinated polyimide films. The dielectric constant of the nanoporous fluorinated polyimide film can be varied by altering the graft concentration of the labile side chains.

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