Growth of Patterned Nanopore Arrays of Anodic Aluminum Oxide


  • The authors are grateful for the financial support from Army Research Office DEPSCoR Grant, NSF (EAR02–10820) and the Ceramic and Composite Materials Center at the University of New Mexico.


An inexpensive procedure to fabricate highly ordered, patterned through-hole nanopore arrays of anodic aluminum oxide (AAO, see Figure) with intermittent aluminum supports has been developed. Silica was used as the anodization barrier. Using a two-step anodization process, straight nanopores of AAO are formed in the unpatterned areas; no pores are found in the patterned areas.