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Keywords:

  • Flexible electronics;
  • Indium tin oxide (ITO);
  • Ion-assisted deposition;
  • Light-emitting diodes

Ion-assisted deposition (IAD) was used to deposit smooth, adherent, and electrically/optically high-quality indium tin oxide (ITO) films on glass and plastic substrates at room temperature. These films afforded organic light-emitting diode performance comparable to devices with commercial ITO/glass anodes, indicating that IAD is an attractive technique for low-temperature ITO deposition, especially on plastics (see Figure).