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Advanced Materials

High-Performance Organic Light-Emitting Diodes Using ITO Anodes Grown on Plastic by Room- Temperature Ion-Assisted Deposition


  • This work was supported by the NSF MRSEC Program through the Northwestern Materials Research Center (NSF DMR-0076097) and by the United States Display Consortium (USDC).


Ion-assisted deposition (IAD) was used to deposit smooth, adherent, and electrically/optically high-quality indium tin oxide (ITO) films on glass and plastic substrates at room temperature. These films afforded organic light-emitting diode performance comparable to devices with commercial ITO/glass anodes, indicating that IAD is an attractive technique for low-temperature ITO deposition, especially on plastics (see Figure).

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