Nanoporous Ultra-Low-κ Fluoropolymer Composite Films via Plasma Polymerization of Allylpentafluorobenzene and Magnetron Sputtering of Poly(tetrafluoroethylene)

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Abstract

Fluoropolymer composite films with nanoporous morphology and dielectric constants less than 2.0, consisting of plasma-polymerized allylpentafluorobenzene (pp-APFB) nanospheres and magnetron sputter-deposited poly(tetrafluoroethylene) (s-PTFE) dense layers, have been prepared on hydrogen-terminated Si(100) (H-Si) substrates (see Figure).

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