Formation of TiO2 and ZrO2 Nanotubes Using Atomic Layer Deposition with Ultraprecise Control of the Wall Thickness


  • The authors gratefully acknowledge the financial support through the Center for Nanostructured Materials Technology of the Korean Ministry of Science and Technology, as well as internal research funds from Kookmin University. Prof. M. M. Sung also thanks the program of the National Research Laboratory from the Korean Ministry of Science and Technology.


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Nanotubes of TiO2 and ZrO2 (see Figure) with diameters of ca. 30–200 nm have been successfully fabricated by atomic layer deposition in a one-step process utilizing nanoporous membranes (commercial polycarbonate filters) as templates. Sub-angstrom wall thickness control and high aspect ratios can be achieved by this method.