This research was supported by the MESA+ Institute for Nanotechnology and is part of the Strategic Research Orientation ‘Advanced Photonic Structures’. Mark A. Smithers of the CMAL/MESA+ is acknowledged for operating the high-resolution SEM.
Stamps for Submicrometer Soft Lithography Fabricated by Capillary Force Lithography †
Article first published online: 21 JUL 2004
Copyright © 2004 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim
Volume 16, Issue 13, pages 1086–1090, July, 2004
How to Cite
Bruinink, C. M., Péter, M., de Boer, M., Kuipers, L., Huskens, J. and Reinhoudt, D. N. (2004), Stamps for Submicrometer Soft Lithography Fabricated by Capillary Force Lithography . Adv. Mater., 16: 1086–1090. doi: 10.1002/adma.200306523
- Issue published online: 21 JUL 2004
- Article first published online: 21 JUL 2004
- Manuscript Accepted: 21 APR 2004
- Manuscript Received: 25 NOV 2003
- Lithography, capillary force;
- Lithography, soft;
- Replica molding;
A convenient, inexpensive technique for fabrication of stamps for submicrometer soft lithography from masters with micrometer-size features is presented. Templates fabricated by capillary-force lithography are robust against replica molding of stamps. The Figure shows the resulting metal structure after employing such a second-generation stamp in microcontact printing of octadecanethiol and subsequent wet chemical etching of the underlying gold.