A Novel Approach to Synthesizing Calcium Copper Titanate Thin Films with Giant Dielectric Constants


  • This work has been partially supported by MIUR (Ministero dell'Istruzione, dell'Università e della Ricerca) under progetto Fondo Integrativo Speciale per la Ricerca (FISR). The authors thank Mr. Corrado Bongiorno of the IMM CNR of Catania for assisting with the TEM observations.


Good quality CaCu3Ti4O12 giant dielectric constant films have been prepared by metal–organic chemical vapor deposition on LaAlO3 (001) substrates, using a multimetal molten precursor source. The growth of the oxide layer by a two-step in-situ process, namely deposition of an amorphous matrix and the consequent in-situ annealing, has resulted in epitaxial (00l) CaCu3Ti4O12 thin films.