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Keywords:

  • Lasers, femtosecond-pulsed;
  • Lithography, soft;
  • Microfluidic systems;
  • Micromachining

A femtosecond-pulsed Ti:sapphire laser is used to generate surface features in slabs of poly(dimethylsiloxane) with minimum dimensions of 1 μm—smaller than those available by rapid-prototyping techniques using transparency masks. The fabrication of magnetic field concentrators and the addition of custom features to a generic microfluidic channel (see Figure) demonstrate the utility of the technique.