Controlling Dielectric and Optical Properties of Ordered Mesoporous Organosilicate Films

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Abstract

Mesoporous hybrid inorganic–organic silicate films with pendant methyl groups are prepared. With a high organic fraction, these films are hydrophobic, which is important in the fabrication of low-k dielectrics. The refractive index of layers with smaller organic fraction can be switched reversibly over a large refractive index interval by varying the relative humidity (see Figure).

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