Get access

Template-Assisted Fabrication of Dense, Aligned Arrays of Titania Nanotubes with Well-Controlled Dimensions on Substrates


  • The authors appreciate technical criticism from Prof. D. W. Grainger (Colorado State Univ., USA). We acknowledge the cooperation of the Digital Systems Development Center of Sanyo Electric Co., Ltd. This work was supported by Grants-in-Aid for Scientific Research (16200036, 16300161) from the Japan Society for the Promotion of Science.


Dense arrays of vertically aligned titania nanotubes (see Figure) are created directly on silicon substrates by combining atomic layer deposition with an alumina template-based fabrication approach. This method enables excellent control over the nanotube dimensions, including their wall thickness, diameter, and height. Nanotubes were fabricated with tube walls thin enough (< 3 nm) to exhibit a wall-thickness- dependent blue-shift in the optical absorption spectra of the arrays.

original image
Get access to the full text of this article