Advanced Materials

Imprinting Well-Controlled Nanopores in Organosilicate Dielectric Films: Triethoxysilyl-Modified Six-Armed Poly(ϵ-caprolactone) and Its Chemical Hybridization with an Organosilicate Precursor

Authors

  • B. Lee,

    1. Department of Chemistry, Pohang Accelerator Laboratory, Center for Integrated Molecular Systems and Division of Molecular and Life Sciences, Pohang University of Science & Technology, Pohang 790-784, Republic of Korea
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  • W. Oh,

    1. Department of Chemistry, Pohang Accelerator Laboratory, Center for Integrated Molecular Systems and Division of Molecular and Life Sciences, Pohang University of Science & Technology, Pohang 790-784, Republic of Korea
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  • Y. Hwang,

    1. Department of Chemistry, Pohang Accelerator Laboratory, Center for Integrated Molecular Systems and Division of Molecular and Life Sciences, Pohang University of Science & Technology, Pohang 790-784, Republic of Korea
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  • Y.-H. Park,

    1. Department of Chemistry, Pohang Accelerator Laboratory, Center for Integrated Molecular Systems and Division of Molecular and Life Sciences, Pohang University of Science & Technology, Pohang 790-784, Republic of Korea
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  • J. Yoon,

    1. Department of Chemistry, Pohang Accelerator Laboratory, Center for Integrated Molecular Systems and Division of Molecular and Life Sciences, Pohang University of Science & Technology, Pohang 790-784, Republic of Korea
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  • K. S. Jin,

    1. Department of Chemistry, Pohang Accelerator Laboratory, Center for Integrated Molecular Systems and Division of Molecular and Life Sciences, Pohang University of Science & Technology, Pohang 790-784, Republic of Korea
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  • K. Heo,

    1. Department of Chemistry, Pohang Accelerator Laboratory, Center for Integrated Molecular Systems and Division of Molecular and Life Sciences, Pohang University of Science & Technology, Pohang 790-784, Republic of Korea
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  • J. Kim,

    1. Department of Chemistry, Pohang Accelerator Laboratory, Center for Integrated Molecular Systems and Division of Molecular and Life Sciences, Pohang University of Science & Technology, Pohang 790-784, Republic of Korea
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  • K.-W. Kim,

    1. Department of Chemistry, Pohang Accelerator Laboratory, Center for Integrated Molecular Systems and Division of Molecular and Life Sciences, Pohang University of Science & Technology, Pohang 790-784, Republic of Korea
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  • M. Ree

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  • This study was supported by the Ministry of Commerce, Industry and Resources (MCIR) and the Ministry of Science and Technology (MOST) (contracted under M103BY010035-03B2501-03550), by the Center for Integrated Molecular Systems (KOSEF), and by the Ministry of Education (BK21 Program). Synchrotron GISAXS measurements were supported by MOST and POSCO. Dr. B. Lee, Dr. W. Oh, and Dr. Y. Hwang contributed equally to this work.

Abstract

A triethoxysilyl-terminated, six-armed poly(ϵ-caprolactone) porogen is synthesized and the terminal groups are found to significantly reduce the aggregation of the porogen molecules in an organosilicate precursor via their hybridization reaction with the precursor. The porogen molecules successfully imprint nanopores in the organosilicate dielectric thin film (see Figure) through their sacrificial thermal decomposition.

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