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Keywords:

  • Lithography, nano-;
  • Nanostructures, inorganic
Thumbnail image of graphical abstract

A nanometer-sized ethyl alcohol meniscus induced between a conductive atomic force microscope tip and a silicon surface (see Figure) allows the fabrication of nanodots or nanowires of SiCx at a predetermined position on the substrate. The meniscus size and kinetic parameters control the nanostructure size.